At VT Vacuum Technologies, as a supplier of process control equipment for the Measurement and Control of Pressure/Vacuum, we understand that establishing a consistent regular calibration program for your gas pressure and flow instrument is critical to ensuring repeatable processes within a tool, between tools in the same facility, across tools in similar facilities, and when transferring processes across stages of the tool’s life cycle. Ensuring instrument calibrations that are accurate and traceable is essential to meeting the documentation needs for ISO 9000 or SEMI standards.

All calibration services are performed by trained service engineers using the latest in calibration equipment. If any components are replaced during calibration, your unit is run through a stability test. This test ensures that changes in ambient temperature conditions cause only predictable changes (within published specifications) in the instrument measurement. Instrumentation is returned complete with calibration data showing traceability to the appropriate national or international standards laboratory.

Our calibration centres are capable of traceable measurements for gas pressure from 1 x 10-5 Torr to 1000 Torr; and for gas flow from 10 SCCM to 50,000 SCCM / 50 SLM (nitrogen equivalent). All calibrations are directly traceable to the National Institute of Standards and Technology (NIST), USA.